Optical waveguides with trench structures
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United States of America Patent
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-
Sep 16, 2003
Grant Date -
Jun 20, 2002
app pub date -
Oct 15, 2001
filing date -
Oct 13, 2000
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Arrangements using air trench cladding enables minimization of the evanescent tail to suppress light coupling to radiation modes, resulting in low-loss bends and splitters. Structures including sharp bends and T-splitters without transmission loss, crossings without crosstalk, and couplers from/to fibers and with out-of-plane waveguides without substantial loss are provided with such air trench claddings. Air trench sidewall cladding of waveguides pushes evanescent tails toward top and bottom claddings to enhance coupling between vertically positioned waveguides. Fabrication processes using wafer bonding technology are also provided.
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