Surface-acoustic-wave pressure sensor and associated methods
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United States of America Patent
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-
Jun 3, 2003
Grant Date -
Jun 27, 2002
app pub date -
Jun 29, 2001
filing date -
Jun 30, 2000
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A pressure and temperature sensor includes a sealed insulating package and an elastic, piezoelectric substrate deformably supported within the package. At least three surface-acoustic-wave resonators are affixed to a bottom of the substrate. A first and a second resonator are positioned in parallel relation along the substrate. A third resonator has a long axis nonparallel to the long axes of the first and the second resonator. The temperature coefficients of the first and second resonators are substantially equivalent; that of the third is different from those of the first and the second resonator, for permitting a temperature change to be sensed. Electrical connectors extend between the resonators to the outside of the package. A sensing system also includes an antenna for sending and receiving electromagnetic signals to and from the device.
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