Apparatus and method for measuring surface shape
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United States of America Patent
Stats
-
Nov 18, 2003
Grant Date -
Jun 27, 2002
app pub date -
Dec 5, 2001
filing date -
Dec 5, 2000
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
The surface shape measuring apparatus comprises a polar coordinate conversion portion for converting the orthogonal coordinate data representing the surface shape of a measurement object into the polar coordinate data, an approximate expression calculating portion for calculating an approximate expression on the basis of the polar coordinate data employing the Zernike's polynomial, an angle calculating portion for calculating angles representing the generating line and principal directions, a first approximate sectional shape calculating portion for calculating approximate sectional shapes in the generating line and principal line directions based on the calculated angles, a second approximate sectional shape calculating portion for calculating the center coordinates and the radiuses of curvature for the approximate sectional shapes, and a sectional shape data calculating portion for calculating the numerical data of approximate sectional shapes in the generating line and principal line directions on the basis of the center coordinates and the radiuses of curvature.
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Cited Art Landscape
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