Apparatus and method of crystallizing amorphous silicon
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United States of America Patent
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Apr 15, 2008
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app pub date -
Dec 26, 2001
filing date -
Dec 28, 2000
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Abstract
A sequential lateral solidification apparatus includes a laser generator for generating and emitting a laser beam; an X-Y stage movable in two orthogonal axial directions; and a mask arranged between the laser generator and the X-Y stage. The mask has a plurality of slits through which the laser beam passes. An objective lens for scaling down the laser beam is arranged between the mask and the X-Y stage. A mask stage is connected to the mask for controlling minute movement of the mask for crystallizing amorphous silicon in one block.
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