Method for drying a substrate
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United States of America Patent
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Jun 3, 2003
Grant Date -
Jul 4, 2002
app pub date -
Apr 17, 2001
filing date -
Sep 4, 1998
priority date (Note) -
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Abstract
A method for drying a disk-shaped substrate. The substrate is typically a substrate used for the manufacture of magnetic disks, and has a centrally located opening. The substrate is lowered into a liquid bath by a first holder, which also becomes immersed in the bath. The first holder lifts the substrate until the substrate extends partially out of contact with the liquid. A second, dry holder grabs a dry portion of the substrate that extends out of the bath, and continues to lift the substrate out of contact with the liquid. In one embodiment, different portions of the substrate are lifted past the surface of the liquid at different speeds
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