Method for manufacturing a surface acoustic wave device
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United States of America Patent
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-
Dec 7, 2004
Grant Date -
Jul 4, 2002
app pub date -
Jan 16, 2002
filing date -
Sep 2, 1999
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A surface acoustic wave device includes a piezoelectric plate and at least one interdigital electrode provided on the piezoelectric plate. The interdigital electrode includes a first metallic thin film and a second metallic thin film laminated on the first metallic thin film and containing tantalum as a principal component, and at least a portion of the tantalum of the second metallic thin film is .alpha.-tantalum.
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