Porous getter devices with reduced particle loss and method for manufacturing same
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United States of America Patent
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Sep 16, 2003
Grant Date -
Jul 18, 2002
app pub date -
Sep 27, 2001
filing date -
Sep 27, 2000
priority date (Note) -
Expired
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Abstract
A method for reducing the loss of particles from the surface of porous getter bodies is taught herein. The method consists in producing on the surface of the porous getter a thin layer of a metal or metal alloy with a deposition technique selected among the deposition of materials from arc generated plasma, ionic beam deposition and cathodic deposition. The deposition technique allows for granular or columnar surface of the covering material but still allowing access to the surface of the getter material, resulting in a reduced getter particle loss.
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