Accelerometer with re-entrant grooves
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United States of America Patent
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-
N/A
Issued Date -
Aug 8, 2002
app pub date -
May 29, 2001
filing date -
May 30, 2000
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
An accelerometer for measuring seismic data. The accelerometer includes a measurement mass assembly having top and bottom electrodes, a top capacitor electrode, and bottom capacitor electrode. One or more of the electrodes include re-entrant openings formed in the surface of the electrodes.
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Cited Art Landscape
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