Across-wafer optical MEMS device and protective lid having across-wafer light-transmissive portions
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United States of America Patent
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N/A
Issued Date -
Aug 8, 2002
app pub date -
Dec 19, 2001
filing date -
Dec 19, 2000
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
An across-wafer optical MEMS device includes a protective lid having across-wafer light-transmissive portions. The across-wafer optical MEMS device allows light to pass in a direction substantially parallel to a surface on which the optical MEMS device is mounted. The light-transmissive portions in the protective lid allow light to pass from an optical device located on one side of the optical MEMS device to a second device located on another side of the optical MEMS device. A plurality of optical MEMS devices can be located on the substrate and enclosed by the same lid without wafer-level encapsulation of each optical MEMS device.
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