Method and system for making a micromachine device with a gas permeable enclosure
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United States of America Patent
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N/A
Issued Date -
Sep 19, 2002
app pub date -
Jan 18, 2002
filing date -
Jan 14, 2000
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A method for coating a micro-electromechanical system (MEMS) device is provided. A coating material, such as a ceramic slurry, may be utilized to form a gas permeable enclosure or shell around the device after the coating material hardens. A vacuum may be applied near the device to exert an attractive force on the coating material to aid in homogenously distributing the coating material over the device. In addition, a vibration may be applied to the device to aid in distributing the coating material. If the device is attached to a substrate, a hole may be formed through the substrate with one opening near the device and a second opening located elsewhere. The vacuum may then be applied to the second opening to draw the coating material over the device and towards the first opening.
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