Inspection apparatus, inspection method and inspection unit therefor
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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-
Mar 9, 2004
Grant Date -
Oct 3, 2002
app pub date -
Oct 9, 2001
filing date -
Feb 10, 2000
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
The present invention provides an inspection apparatus, an inspection method and an inspection unit therefor capable of inspecting a conductive pattern in a complete non-contact manner. In the method for inspecting a conductive pattern of a circuit board in a complete non-contact manner, a plurality of electrically conductive cells 11 are arranged along the conductive pattern of the circuit board 100 with leaving a space therebetween. An inspection signal having temporal variations is supplied to at least one of the cells 11 in the conductive pattern without using any pin. An output signal appearing at another at least one of the cells through the conductive pattern in response to the applied inspection signal is detected. The conductive pattern is inspected based on the detected output signal.
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