Method and apparatus for producing gas containing metal particles and for evaluating particle counter and particle trapper
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United States of America Patent
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Issued Date -
Oct 10, 2002
app pub date -
Mar 7, 2002
filing date -
Apr 9, 2001
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A method and an apparatus for producing a gas containing metal particles are described, by which the metal particles can be generated quite easily in a state similar to that in real use. Also, a method and an apparatus for evaluating a particle counter or a particle trapper by using the gas containing metal particles are described, in which the evaluation is performed under the conditions similar to those in real use. The gas containing metal particles is produced by conducting a carrier gas through a hollow metal tube and simultaneously heating the hollow metal tube to produce metal particles by vaporization effect. The pressure and the flow rate of the carrier gas and the heating amount can be controlled to produce metal particles having a required size distribution and a required concentration.
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