Method and apparatus for a spectrally stable light source using white light LEDs

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United States of America Patent

APP PUB NO 20020145728A1
SERIAL NO

09828038

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An apparatus and method for a spectrally stable light source is disclosed. An excitation source provides a spectrally stable light within a predetermined bandwidth. The spectrally stable light is directed at a reflective target. A light sensor receives reflected light from the surface of the target through the fiber optic cable and generates reflected spectral data. A computer receives the reflected spectral data and calculates a signal based on the reflected spectral data.

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Patent Owner(s)

Patent OwnerAddress
SPEEDFAM-IPEC CORPORATIONCHANDLER AZ

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Adams, John A Escondido, CA 53 2753
Eaton, Robert A Scottsdale, AZ 9 333

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