Micromachined springs for strain relieved electrical connections to IC chips

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United States of America Patent

SERIAL NO

10036580

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Abstract

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The present invention provides a technique for interconnecting two or more substrates, in which the interconnecting elements are mechanically compliant. Compliant electrical connections between substrates are desirable for absorbing stresses that occur due to thermal cycling. The invention also provides a scalable technique for fabricating structures, which are then pulled up into a pop-up position.

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Patent Owner(s)

Patent OwnerAddress
COHN MICHAEL BNot Provided

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cohn, Michael B Berkeley, CA 14 1871

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