Method and apparatus for detecting and latching the position of a MEMS moving member
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
N/A
Issued Date -
Nov 7, 2002
app pub date -
May 3, 2002
filing date -
May 4, 2001
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
An apparatus for detecting the position of an optical element includes an actuator coupled to the optical element. A sensor coupled to the optical element senses the movement of the optical element. The sensor includes a moveable electrode coupled to the optical element for outputting a position detection signal.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully