MEMS assemblies having moving members and methods of manufacturing the same
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United States of America Patent
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N/A
Issued Date -
Nov 7, 2002
app pub date -
May 3, 2001
filing date -
May 3, 2001
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
Methods of manufacturing a MEMS assembly having a shutter or mirror driven by an actuator. The MEMS assembly can be formed by grooving a substrate, forming a displaceable member and electrode actuators on the substrate, and joining to a supporting base. Alternatively, the mirror core and the electrode actuators can be formed on separate substrates and thereafter be joined. A MEMS actuator which moves the member in a direction perpendicular to the MEMS actuator's own plane has interlaced internal ridges. When voltage is applied to the ridges, the actuator's upper and lower substrates move together.
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