Hybrid crucible susceptor
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United States of America Patent
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N/A
Issued Date -
Nov 14, 2002
app pub date -
Mar 8, 2001
filing date -
Mar 8, 2001
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A crucible susceptor for a crystal growing process for pulling a crystal ingot from a crystal material melt in a crucible, comprises at least one high purity composite component containing a carbon fiber reinforced carbon matrix, said at least one high purity composite component having a total level of metal impurity less than about 10 parts per million; and at least one high purity graphite component, said at least one high purity graphite component having a total level of metal impurity less than about 10 parts per million. A single crystal growing process for pulling a single crystal ingot from a crystal material melt includes providing a crystal material melt in a crucible and intimately supporting the crucible with the crucible susceptor of the present invention. The crucible susceptor disclosed may be used in a Czochralski crystal growing process for pulling a semiconductor ingot from a semiconductor material melt.
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