Methods using filters employing both acidic polymers and physical-adsorption media
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United States of America Patent
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Jul 13, 2004
Grant Date -
Dec 5, 2002
app pub date -
Jul 26, 2002
filing date -
May 5, 2000
priority date (Note) -
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Abstract
A filter includes at least two different adsorptive media. First, chemisorptive media, which is porous and includes an acidic functional group, is used to remove molecular bases, including ammonia, organic amines, imides and aminoalcohols, from the atmosphere used in semiconductor fabrication and other processes that require uncontaminated gaseous environments of high quality. Second, physisorptive media is able to adsorb condensable contaminants, particularly those having a boiling point greater than 150 degrees C. The physisorptive media can include untreated, activated carbon.
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