Optical MEMS device and package having a light-transmissive opening or window
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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N/A
Issued Date -
Dec 5, 2002
app pub date -
Dec 19, 2001
filing date -
Dec 19, 2000
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
An optical MEMS device and a package include an optical through path for allowing light to pass from a first side of the package, through a substrate on which the optical MEMS device is mounted and through a second side of the package opposite the first side. The package can include first and second light-transmissive portions or apertures for allowing the light to pass. The optical MEMS device can be a shutter for selectively affecting the flow of light through the package. A plurality of optical MEMS devices may be located within a single package because the optical paths for the MEMS devices can be substantially parallel to each other.
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