Polishing apparatus that provides a window
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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-
N/A
Issued Date -
Dec 19, 2002
app pub date -
May 16, 2002
filing date -
Jun 15, 2001
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A polishing pad apparatus includes, a polishing pad, an optically transmissive window framed by an opening through the polishing pad, the window being part of an underlay, and the underlay having a perimeter that extends substantially beyond the perimeter of the window to form a fluid impermeable layer that isolates a rear surface of the window from obstruction by polishing fluid.
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Cited Art Landscape
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