Method for reading out a detection chip of an electronic camera

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United States of America Patent

APP PUB NO 20020196331A1
SERIAL NO

10170623

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Abstract

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The present invention concerns a method for reading out a detection chip of an electronic camera in a coordinate measuring instrument for determining the position of an edge of a feature on a substrate, having at least two digitization devices reading out the detection chip, with each of which individual pixels of the detection chip are associated, the digitized data read out by the digitization devices being subjected to a data reduction in order to extract characteristic measurement parameters. The method is intended to make it possible for the detected image data of a large-format camera to be equalized, and optionally for characteristic measurement parameters to be extracted, even at a high readout rate, with the computational capacity essentially of a fast personal computer. The method according to the present invention for reading out a detection chip of a camera is characterized in that an equalization of the reduced digitized data of the various digitization devices is accomplished with a correction function.

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Patent Owner(s)

Patent OwnerAddress
LEICA MICROSYSTEMS SEMICONDUCTOR GMBHGERMANY WETZLAR WETZLAR HESSIAN

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Rinn, Klaus Heuchelheim, DE 23 258

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