Polishing pad of polymer coating
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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-
N/A
Issued Date -
Jan 16, 2003
app pub date -
Jun 27, 2001
filing date -
Jun 27, 2001
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A polishing pad constructed with an underlay providing a shaped preform, and a layer of polishing material provided as a coating conforming to the shaped preform, the coating forming a polishing surface on the polishing pad, the coating adhering to the shaped preform without completely covering openings extending through the thickness of the underlay, whereby the openings provide the polishing pad with a desired porosity.
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Cited Art Landscape
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