Micromachined optical phase shift device

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20030025981A1
SERIAL NO

09918732

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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An apparatus and method for adjustably reflecting light is provided. The apparatus includes a base and, positioned above the base, a member having an upper surface and a lower surface. A reflective coating is applied to at least a portion of the upper surface. The system also includes a capacitive plate positioned between the member and the base. The capacitive plate is operable to deflect the member, which alters the orientation of the member relative to the base. A second member, which may be deformable, may be attached to the first member so that deformation of the second member alters the orientation of the first member relative to the base. The deflection of the surface enables the apparatus shift the phase of the reflected light, as well as to change the angle of the reflected light. In addition, the apparatus may be used in applications such as digital projection, optical-optical switching, Fabry-Perot interferometry, and phase shifting based inferometry.

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Patent Owner(s)

Patent OwnerAddress
BALL SEMICONDUCTOR INC4415 CENTURY PARKWAY ALLEN TX 75013

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ahrens, Phillip Dallas, TX 1 6
Chan, Kin Plano, TX 9 222
Farrow, Wade P Dallas, TX 23 589
Feng, Zhiqiang Nagareyama-Shi, JP 12 62
Ishikawa, Akira Royse City, TX 264 6805
Kanatake, Takashi Dallas, TX 25 419
Mei, Wenhui Plano, TX 31 1001
Mueller, Chad Wylie, TX 15 128

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