QUENCHING OF PHASE-MATCHED SURFACE WAVES (SUBSTRATE MODES) IN LINBO3 MODULATORS
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United States of America Patent
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Issued Date -
Mar 13, 2003
app pub date -
Sep 23, 1998
filing date -
Sep 23, 1998
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Abandoned
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Abstract
Selective removal of materials from the substrate of an integrated electro-optical device prevents coupling to substrate modes. The selective removal may be accomplished by laser ablation, mechanical removal such as grinding, chemical etching agents, or combinations thereof. The strength of the substrate is maintained by not removing materials from areas where removal is not needed.
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