Microelectromechanical tunable fabry-perot wavelength monitor with thermal actuators
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United States of America Patent
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Issued Date -
Mar 20, 2003
app pub date -
Sep 17, 2001
filing date -
Sep 17, 2001
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A microelectromechanical wavelength monitor includes a first wafer that includes a first movable layer. A first chevron is a thermal actuator that is connected to the first movable layer by a first tether. A second chevron is a thermal actuator that is connected to the first movable layer by a second tether. A second wafer is bonded to the first wafer and includes a trench defining a second stationary layer that is flat or curved. The first and second chevrons adjust a distance between the first movable layer and the second stationary layer to vary a resonated wavelength between the first and second stationary layers. The first movable layer includes an antireflective coating formed on an outer surface thereof. The first and second movable layers include a highly reflective coating formed on an inner surface thereof.
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