Importance

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Abstract

In order to detect the position of notch or orientation flat during high speed rotation while preventing deviation of position of a wafer by gripping the wafer securely, an aligner 1 comprises a machine bed 10, a transfer arm 20 of a water 3, and a holding clamper 30. The holding clamper 30 has upper arms 33, 34, 35, and is designed to grip the wafer 3 securely, and is elevatable by means of an elevating drive unit 15, and is also movable in the horizontal direction of the upper arm 3 by means of an opening drive unit 16. Accordingly, the wafer 3 put on the transfer arm 20 is gripped by the holding clamper 30 and rotated by one revolution, so that the position of the notch is detected by a detector, and the notch is moved to the reference rotation position. Further, en engaging pawl is disposed in the upper arm 33, and when gripping the wafer 3, the engaging pawl can be engaged with the notch of the wafer 3.

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First Claim