Precise measurement system for barrier materials
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United States of America Patent
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Jul 27, 2004
Grant Date -
Apr 24, 2003
app pub date -
Oct 19, 2001
filing date -
Oct 19, 2001
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A system is provided for measuring transmission characteristics of a gas of interest through a barrier material wherein a sealed test gas chamber is provided on one side of the barrier material and an aligned sealed measurement chamber is provided on the opposite side of the barrier material. A rough vacuum is pulled in the test gas chamber and a high vacuum pulled in the measurement chamber to establish a set pressure differential therebetween. A mass spectrometer having partial gas sensitivities of 5.times.10.sup.-4 Torr or lower in fluid communication with the measurement chamber determines permeation of the test gas of interest through the barrier material.
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