Micro movable mechanism system and control method for the same
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United States of America Patent
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Aug 8, 2006
Grant Date -
May 22, 2003
app pub date -
Oct 9, 2002
filing date -
Oct 11, 2001
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A micro movable mechanism system includes a micro movable mechanism. A target position generating section generates a signal indicative a target position of the micro movable mechanism. A nonlinear control unit outputs a controller output signal indicating a control value based on a difference between the target position signal and a signal indicating a current position of the micro movable mechanism. A root correction section drives the micro movable mechanism based on a signal proportional to a square root of the control value.
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