Methods and compositions for the formation of recessed electrical features on a substrate
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United States of America Patent
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app pub date -
Oct 4, 2002
filing date -
Oct 5, 2001
priority date (Note) -
Abandoned
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Abstract
Precursor compositions having a low conversion temperature and methods for the fabrication of recessed electrical features from the precursor compositions. The electrical features can be conductors, resistors and dielectric features. The precursor compositions are deposited into recessed features, such as trenches, formed in a substrate and are reacted at a low temperature to form electrical features having good electrical and mechanical properties. The substrate can be a low temperature substrate, such as an organic substrate.
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