Microlens array fabrication
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United States of America Patent
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N/A
Issued Date -
Jun 12, 2003
app pub date -
Dec 6, 2001
filing date -
Dec 6, 2001
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A new and unique method for fabricating a microlens array is provided. First, a mask layer is applied to an optical substrate. One or more holes are then created in the mask layer so that corresponding first cavities can then be created in the substrate. Each of these first cavities has a predetermined depth and a first width. The mask layer is then removed so that one or more second cavities can be created in the substrate, the second cavities corresponding with the first cavities. Each of these second cavities has approximately the same predetermined depth as the corresponding first cavity and having a second width greater than the first width.
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