Method and apparatus for polishing substrates
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United States of America Patent
Stats
-
Jul 4, 2006
Grant Date -
Jun 19, 2003
app pub date -
Oct 10, 2002
filing date -
Oct 11, 2001
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
Method and apparatus for polishing substrates. A chemical mechanical polishing article comprises a body and a patterned surface. The patterned surface comprises a plurality of slurry distribution grooves and a plurality of islands on the body. Each of the plurality of the islands comprises a base portion, a polishing surface disposed thereon, and a contoured surface disposed therebetween. The base portion comprises one or more sidewalls defining at least a portion of the plurality of slurry distribution grooves. The polishing surface is smaller than the base portion, the difference therebetween attributable to the contoured surface. In a particular embodiment, conductive materials and low k dielectric films are polished with reduced or minimum substrate surface damage.
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