Resistive heaters and uses thereof
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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N/A
Issued Date -
Jul 3, 2003
app pub date -
Aug 15, 2002
filing date -
Nov 29, 2000
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
The present invention features a metallic resistive heater and uses thereof. The resistive heater includes a metallic component that is electroconductive (i.e., has low resistivity) and an oxide, nitride, carbide, silicide, and/or boride derivative of the metal component that is electrically insulating (i.e., has high resistivity). The resistivity is controlled in part by controlling the amount of oxide, nitride, carbide, silicide, and boride formation during the deposition of the metal component and the derivative.
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