System for supplying a gas and method of supplying a gas

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20030133854A1
SERIAL NO

10210872

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The present invention provides a system for supplying a gas capable of supplying a gas at a proper flow rate and forming a gas at a proper rate from a gas-forming unit. The invention provides a system for supplying a gas including a gas-forming unit, a gas supply passage for supplying a gas produced from the gas-forming unit, a gas flow rate controller provided in the gas supply passage, a gas discharge passage provided in parallel with the gas supply passage to discharge the gas produced from the gas-forming unit, and a pressure controller provided in the gas discharge passage to control the pressure of the gas flowing through the gas discharge passage. In the above system for supplying a gas, it is possible to optimize the flow rate of the gas that is supplied and the amount of the gas generated by the gas-forming unit.

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Patent Owner(s)

Patent OwnerAddress
TOSHIBA MITSUBISHI-ELECTRIC INDUSTRIAL SYSTEMS CORPORATIONTOKYO

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Tabata, Yoichiro Tokyo, JP 48 1181
Usui, Akaru Tokyo, JP 15 530

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