Inexpensive fabrication of large-area pixel arrays for displays and sensors
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United States of America Patent
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Apr 25, 2006
Grant Date -
Jul 17, 2003
app pub date -
Dec 30, 2002
filing date -
Apr 19, 2001
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A method and system for fabricating an array of electronic devices, typically a display or sensor is described. In the method, a droplet source ejects droplets of a masking material for deposit on a thin film or substrate surface to mask an element of the array of electronic devices. The temperature of the thin-film or substrate surface is controlled such that the droplets rapidly freeze upon contact with the thin-film or substrate surface. The thin-film or substrate is then etched. After etching the masking material is removed.
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