Method of supercritical processing of a workpiece
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United States of America Patent
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Jun 13, 2006
Grant Date -
Jul 24, 2003
app pub date -
Jan 15, 2003
filing date -
Nov 2, 1999
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An apparatus for supercritical processing and non-supercritical processing of a workpiece comprises a transfer module, a supercritical processing module, a non-supercritical processing module, and a robot. The transfer module includes an entrance. The supercritical processing module and the non-supercritical processing module are coupled to the transfer module. The robot is preferably located within the transfer module. In operation, the robot transfers a workpiece from the entrance of the transfer module to the supercritical processing module. After supercritical processing, the robot then transfers workpiece from the supercritical processing module to the non-supercritical processing module. After the non-supercritical processing, the robot returns the workpiece to the entrance of the transfer module. Alternatively, the non-supercritical processing is performed before the supercritical processing.
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