Microlens array fabrication using CMP

United States of America Patent

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Issued Date
Jul 24, 2003
app pub date
Jul 10, 2002
filing date
Jan 18, 2002

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Abandoned

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Abstract

Methods for fabricating a variety of microlens array structures on substrates using chemical mechanical polishing techniques.

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Patent Owner(s)

Patent Owner	Address
CABOT MICROELECTRONICS CORPORATION	870 NORTH COMMONS DRIVE AURORA IL 60504

International Classification(s)

C03C:CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREO....

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Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Mikolas, David G	Rowland Heights, CA	8	74

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Microlens array fabrication using CMP

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United States of America Patent

10192135

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APP PUB NO	20030136759A1
SERIAL NO	10192135
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10192135

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