Multilayer film optical filter, method of producing the same, and optical component using the same
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United States of America Patent
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Issued Date -
Jul 31, 2003
app pub date -
Jan 17, 2003
filing date -
Jan 25, 2002
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A multilayer film optical filter includes a multilayer film including a plurality of dielectric material thin films repeatedly laminated on a substrate and having different refractive indexes. The multilayer film optical filter further includes a relaxation layer composed of a single material, having a thickness in the range of 1 to 10 .mu.m, and provided below the multilayer film near the substrate, for relaxing the influence of an error in thickness measurement due to a temperature rise of the substrate in an initial stage of deposition.
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