System and method for reducing electric discharge breakdown in electrostatically levitated MEMS devices
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United States of America Patent
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Issued Date -
Aug 14, 2003
app pub date -
Feb 8, 2002
filing date -
Feb 8, 2002
priority date (Note) -
Abandoned
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Abstract
A system and method for reducing electric discharge breakdown occurrences in a micro-electromechanical system device is provided. The device comprises a core, a shell, and electrodes, which may be formed on the shell. When voltage is applied to the electrodes, each electrode applies an electrostatic force on the core. The electrodes are arranged in concentric sets, where each set may comprises two or more electrodes. Due to the concentricity of the electrodes, a minimum distance is maintained between the core and an outer electrode of an electrode set when the core nears or touches an inner electrode of the electrode set.
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