Ceramic heater
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United States of America Patent
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-
May 3, 2005
Grant Date -
Aug 28, 2003
app pub date -
Apr 9, 2001
filing date -
Apr 7, 2000
priority date (Note) -
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status (Latency Note)
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Abstract
A ceramic heater making it possible to prevent a short circuit in its resistance heating element and heat a semiconductor wafer evenly. The ceramic beater includes a ceramic substrate, an insulating layer having volume resistivity higher than that of the ceramic substrate, being formed on at least a part of the ceramic substrate, and a resistance heating element formed on the insulating layer.
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