Microscope and method for measuring surface topography in a quantitative and optical manner
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
N/A
Issued Date -
Aug 28, 2003
app pub date -
Feb 19, 2003
filing date -
Jun 14, 2000
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
The invention relates to a microscope and a method for measuring the surface topography of a workpiece in a quantitative and optical manner. The invention includes a differential interference contrast microscope embodiment according to Nomarski, comprising a light source, a polariser, a changeable Nomarski prism and an analyser. The light source has a narrow frequency spectrum and/or is provided with a special filter having a narrow frequency spectrum; and the microscope is provided with a phase displacement interferometry evaluation unit.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully