Pedestal
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
N/A
Issued Date -
Sep 4, 2003
app pub date -
Feb 27, 2003
filing date -
Mar 1, 2002
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A pedestal for mounting semiconductor fabrication equipment within a clean room. The pedestal includes a base frame sitting on a waffle slab and utility connections. The equipment can readily be connected to the utility connections when positioned on the pedestal. The utility connections are located at the periphery of or across part of a face of the pedestal to thereby define a service area within the periphery.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
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