Reinforced chemical mechanical planarization belt
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United States of America Patent
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Issued Date -
Oct 2, 2003
app pub date -
Mar 29, 2002
filing date -
Mar 29, 2002
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A processing belt for use in chemical mechanical planarization (CMP), and methods for making the same, are provided. Embodiments of the processing belt include a polymeric material reinforced with a woven fabric or synthetic material encased between the polymeric material and an additional polymeric material layer to define the processing belt. The processing belt is fabricated so that the woven fabric forms a continuous loop and is positioned against a surface of the polymeric material. The additional polymeric material layer is applied over the woven fabric, permeating the woven fabric to bond to the polymeric material forming an integral structure of woven fabric reinforced polymeric material.
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