Apparatus for transporting substrates in an oven
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United States of America Patent
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N/A
Issued Date -
Oct 9, 2003
app pub date -
Mar 14, 2003
filing date -
Apr 3, 2002
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
The invention concerns a transport apparatus for transporting substrates in an oven. The oven has a channel formed from a floor and two side walls in which the substrates are transported in a transport direction. The floor of the channel has a recess running along one of the side walls for accepting and guiding a rail in transport direction. The rail is set up for accepting at least one substrate. A drive mechanism moves the rail in transport direction.
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