Positive resist composition
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United States of America Patent
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May 17, 2005
Grant Date -
Oct 16, 2003
app pub date -
Feb 14, 2003
filing date -
Feb 19, 2002
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The present invention provides a positive resist composition comprising a resin which itself is insoluble or poorly soluble in an alkali aqueous solution but becomes soluble in an alkali aqueous solution by the action of an acid, and an acid generator, wherein the content of halogen atoms in the resin is 40% by weight or more, at least one of structural units constituting the resin is a structural unit having an alicyclic hydrocarbon skeleton, and the structural unit having an alicyclic hydrocarbon skeleton contains therein at least one group rendering the resin soluble in an alkali aqueous solution by the action of an acid, and at least one halogen atom.
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