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Abstract

The present invention provides a miniaturized infrared gas analyzing apparatus, which is composed of various kinds of micro elements (e.g., infrared light source, tunable filter, and thermal detector) fabricated by means of silicon micromachining technology so as to meet the requirements of low power consumption and low cost and apply to qualitative and quantitative analysis of infrared absorption spectra of various kinds of gases. The miniaturized infrared gas analyzing apparatus comprises an infrared emitting unit, an infrared collimator, a bandpass and spatial filter, a tunable filter unit, a sensing unit, and a microprocessing unit. The infrared emitting unit utilizes the blackbody radiation principle of thermo-resistive filament to radiate out a wide infrared spectrum and serves as a point light source. The infrared collimator converts the infrared emitting unit into a collimated infrared light beam. The bandpass and spatial filter allows the transmission of an wide passband including at least the absorption wavelength of a specific gas to be sensed, and only let the infrared light beam passing within a specific geometric region. The Fabry-Perot tunable filter unit utilizes electric field to control the length of resonant cavity so that only the narrow-bandwidth wavelength matching the absorption spectrum of the sensed gas can pass at a time. The sensing unit determines the concentration of the sensed gas according to the light intensity. And, a microprocessing unit is used for controlling of all the components mentioned above.

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First Claim