Process for making micro-optical elements from a gray scale etched master mold
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United States of America Patent
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Issued Date -
Nov 13, 2003
app pub date -
Nov 1, 2002
filing date -
Nov 2, 2001
priority date (Note) -
Abandoned
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Abstract
Embodiments of the invention provide methods and processes for creating and using high precision molds for creating micro-optical elements, such as micro-lenses. A master mold is created using one of at least gray scale technologies or direct write lithography to provide highly accurate micro-optical contours on a substrate or resist layer upon which the master mold is formed. The master mold may be used to create secondary molds for use in production of highly precise micro-optical elements from various materials.
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