Importance

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Abstract

On the basis of layout information and process information, a three-dimensional TCAD conducts simulations of a three-dimensional structure while taking adversely-affecting device phenomena into account and outputs electric characteristic data corresponding to design rules defined in the layout information for the same number of times as the number of plural pieces of design rule information. A simulation result accumulating portion accumulates the electric characteristic data obtained from the three-dimensional TCAD and provides the accumulated electric characteristic data that are associated with the plural pieces of design rule information. Then, on the basis of the accumulated electric characteristic data, a design rule determining portion determines from among the plural pieces of design rule information the optimum design rule information that satisfies a reference value and outputs it as determined design rule information.

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First Claim