Device for generating reactive ions
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United States of America Patent
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Issued Date -
Dec 25, 2003
app pub date -
Jun 19, 2003
filing date -
Jun 19, 2002
priority date (Note) -
Abandoned
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Abstract
The invention relates to devices and methods for generating reactive ions in thin layer chemistry vacuum or vapor chamber where the mixture and delivery of gas to an ion source controlled by a controller sensitive to the chemical make up in the vacuum or vapor chamber.
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