Reflective spatial light modulator
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United States of America Patent
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Issued Date -
Dec 25, 2003
app pub date -
Feb 27, 2003
filing date -
Jun 19, 2002
priority date (Note) -
Abandoned
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Abstract
A micro-mirror array that is useful, for example, in a reflective spatial light modulator. In one embodiment, the micro mirror array includes spacer support walls, a vertical torsion hinge, and a mirror plate, all being fabricated from a single wafer. The micro-mirror array has a large fill ratio.
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