| 7,026,695 Method and apparatus to reduce parasitic forces in electro-mechanical systems
|
8 |
2003
|
| 7,118,234 Reflective spatial light modulator
|
5 |
2004
|
| 7,092,140 Architecture of a reflective spatial light modulator
|
6 |
2004
|
| 7,022,245 Fabrication of a reflective spatial light modulator
|
10 |
2004
|
| 7,449,284 Method and structure for fabricating mechanical mirror structures using backside alignment techniques
|
0 |
2004
|
| 7,034,984 Fabrication of a high fill ratio reflective spatial light modulator with hidden hinge
|
32 |
2004
|
| 6,992,810 High fill ratio reflective spatial light modulator with hidden hinge
|
35 |
2004
|
| 7,042,619 Mirror structure with single crystal silicon cross-member
|
19 |
2004
|
| 7,068,417 Method and apparatus for a reflective spatial light modulator with a flexible pedestal
|
26 |
2004
|
| 7,206,110 Memory cell dual protection
|
4 |
2004
|
| 7,172,921 Method and structure for forming an integrated spatial light modulator
|
3 |
2005
|
| 7,199,918 Electrical contact method and structure for deflection devices formed in an array configuration
|
0 |
2005
|
| 7,142,349 Method and structure for reducing parasitic influences of deflection devices on spatial light modulators
|
0 |
2005
|
| 7,298,539 Co-planar surface and torsion device mirror structure and method of manufacture for optical displays
|
1 |
2005
|
| 7,202,989 Method and device for fabricating a release structure to facilitate bonding of mirror devices onto a substrate
|
2 |
2005
|
| 7,190,508 Method and structure of patterning landing pad structures for spatial light modulators
|
0 |
2005
|
| 7,184,195 Method and structure reducing parasitic influences of deflection devices in an integrated spatial light modulator
|
40 |
2005
|
| 7,374,962 Method of fabricating reflective spatial light modulator having high contrast ratio
|
2 |
2005
|
| 7,502,158 Method and structure for high fill factor spatial light modulator with integrated spacer layer
|
0 |
2005
|
| 7,666,319 Semiconductor etching process to release single crystal silicon mirrors
|
0 |
2005
|
| 7,369,297 Mirror structure with single crystal silicon cross-member
|
2 |
2005
|
| 7,233,428 Method and apparatus for a reflective spatial light modulator with a flexible pedestal
|
4 |
2006
|
| 7,670,880 Method and structure for forming an integrated spatial light modulator
|
0 |
2007
|
| 7,382,519 Method and device for fabricating a release structure to facilitate bonding of mirror devices onto a substrate
|
1 |
2007
|
| 7,570,416 Method and apparatus for a reflective spatial light modulator with a flexible pedestal
|
0 |
2007
|
| 7,428,094 Fabrication of a high fill ratio reflective spatial light modulator with hidden hinge
|
0 |
2007
|
| 8,207,004 Method and structure for forming a gyroscope and accelerometer
|
0 |
2009
|
| 6,885,494 High angle micro-mirrors and processes
|
17 |
2003
|
| 7,019,376 Micromirror array device with a small pitch size
|
10 |
2003
|
| 6,980,347 Micromirror having reduced space between hinge and mirror plate of the micromirror
|
6 |
2003
|
| 6,965,468 Micromirror array having reduced gap between adjacent micromirrors of the micromirror array
|
5 |
2003
|
| 7,436,572 Micromirrors and hinge structures for micromirror arrays in projection displays
|
0 |
2004
|
| 7,019,880 Micromirrors and hinge structures for micromirror arrays in projection displays
|
1 |
2004
|
| 6,980,349 Micromirrors with novel mirror plates
|
12 |
2004
|
| 7,113,322 Micromirror having offset addressing electrode
|
4 |
2004
|
| 6,970,280 High angle micro-mirrors and processes
|
3 |
2004
|
| 7,002,726 Micromirror having reduced space between hinge and mirror plate of the micromirror
|
73 |
2005
|
| 6,985,277 Micromirror array having reduced gap between adjacent micromirrors of the micromirror array
|
4 |
2005
|
| 6,972,891 Micromirror having reduced space between hinge and mirror plate of the micromirror
|
36 |
2005
|
| 6,970,281 Micromirror array having reduced gap between adjacent micromirrors of the micromirror array
|
3 |
2005
|
| 7,483,198 Micromirror device and method for making the same
|
2 |
2005
|
| 7,215,459 Micromirror devices with in-plane deformable hinge
|
14 |
2005
|
| 7,119,944 Micromirror device and method for making the same
|
11 |
2005
|
| 7,071,908 Digital backplane
|
6 |
2004
|
| 7,667,678 Recursive feedback control of light modulating elements
|
0 |
2006
|
| 8,189,015 Allocating memory on a spatial light modulator
|
0 |
2006
|
| 8,089,431 Instructions controlling light modulating elements
|
0 |
2006
|
| 8,035,627 Bit serial control of light modulating elements
|
0 |
2006
|
| 8,004,505 Variable storage of bits on a backplane
|
0 |
2006
|
| 8,120,597 Mapping pixel values
|
1 |
2006
|
| 7,924,274 Masked write on an array of drive bits
|
0 |
2006
|
