Architecture of a reflective spatial light modulator

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United States of America Patent

APP PUB NO 20040004753A1
SERIAL NO

10378058

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Abstract

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A micro-mirror array fabricated on one substrate is bonded to a second substrate that includes addressing electrodes and control circuitry. In one embodiment, the micro mirror array is fabricated from a substrate that is a single crystal material. There is enough area beneath the micro mirror array for electrodes and control circuitry, including memory buffers and a pulse width modulation array to be fabricated on the second substrate.

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Patent Owner(s)

Patent OwnerAddress
MIRADIA INC281 E JAVA DRIVE SUNNYVALE CA 94089

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Pan, Shaoher X San Jose, CA 89 2547

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